location： Current position: Home >> Scientific Research >> Paper Publications

The effect of N2 flow rate on discharge characteristics of microwave electron cyclotron resonance plasma

Hits:

Indexed by:期刊论文

Date of Publication:2009-01-01

Journal:Physics of Plasmas

Volume:16

Issue:53502

Page Number:1-5

Pre One:N含量对CNx薄膜结构和介电性能的影响

Next One:On the defect induced ferromagnetic ordering above romm-temperature in undoped and Mn doped ZnO thin films
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep