EFFECT OF NITROGEN-DOPED CONCENTRATION ON THE TCR OF ITO THIN FILMS AT HIGH TEMPERATURE
Release Time:2023-02-09 Hits:
Date of Publication: 2022-10-02
Journal: 2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021)
Page Number: 856-859
ISSN: 1084-6999
Key Words: "Nitrogen-doped; ITO; High temperature; TCR"