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同轴双放电腔微波ECR等离子体源增强非平衡磁控溅射制备SiN_x薄膜研究

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Date of Publication:2022-10-10

Journal:第十四届全国等离子体科学技术会议暨第五届中国电推进技术学术研讨会

Affiliation of Author(s):物理学院

Page Number:1

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