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双放电腔微波ECR等离子体增强非平衡磁控溅射沉积氮化碳薄膜

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Date of Publication:2022-10-10

Journal:2004年中国材料研讨会

Page Number:1

Note:新增回溯数据

Pre One:化爆材料瞬态切削温度的NiCr/NiSi薄膜热电偶温度传感器的研制

Next One:同轴双放电腔微波ECR等离子体源增强非平衡磁控溅射制备SiN_x薄膜研究
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