location: Current position: Home >> Scientific Research >> Paper Publications

Si过渡层对梯度影响类金刚石薄膜结合力的影响研究

Hits:

Date of Publication:2022-10-08

Journal:功能材料

Issue:10

Page Number:1561-1563,1567

ISSN No.:1001-9731

Pre One:Si掺杂对DLC薄膜结构和性能的影响

Next One:Structural and electrical properties of reactive magnetron sputtered yttrium-doped HfO2 films