location: Current position: Home >> Scientific Research >> Paper Publications

N含量对CNx薄膜结构和介电性能的影响

Hits:

Date of Publication:2022-10-07

Journal:真空

Issue:1

Page Number:17-21

ISSN No.:1002-0322

Pre One:MW-ECR PE-UMS等离子体特性及对Zr-N薄膜结构性能的影响

Next One:Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor