Hits:
Date of Publication:2022-10-07
Journal:真空
Issue:1
Page Number:17-21
ISSN No.:1002-0322
Pre One:MW-ECR PE-UMS等离子体特性及对Zr-N薄膜结构性能的影响
Next One:Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor