MW-ECR PE-UMS等离子体特性及对Zr-N薄膜结构性能的影响
Release Time:2024-10-17 Hits:
Date of Publication: 2022-10-07
Journal: 物理学报
Volume: 54
Issue: 7
Page Number: 3257-3262
ISSN: 1000-3290
Release Time:2024-10-17 Hits:
Date of Publication: 2022-10-07
Journal: 物理学报
Volume: 54
Issue: 7
Page Number: 3257-3262
ISSN: 1000-3290