Current position: Home >> Scientific Research >> Paper Publications

溅射靶功率对氮化碳薄膜结构的影响

Release Time:2024-10-17  Hits:

Indexed by: Journal Article

Date of Publication: 2022-07-02

Journal: 真空科学与技术学报

Issue: 5

Page Number: 350-354

ISSN: 1672-7126

Prev One:沉积参数对碳氮化硅薄膜化学结构及光学性能的影响

Next One:激光淬火在CO_2缸套中的应用
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep