沉积参数对碳氮化硅薄膜化学结构及光学性能的影响
Release Time:2024-10-17 Hits:
Indexed by: Journal Article
Date of Publication: 2022-07-02
Journal: 应用光学
Volume: 27
Issue: 4
Page Number: 274-280
ISSN: 1002-2082
Release Time:2024-10-17 Hits:
Indexed by: Journal Article
Date of Publication: 2022-07-02
Journal: 应用光学
Volume: 27
Issue: 4
Page Number: 274-280
ISSN: 1002-2082