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沉积偏压及N2流量对a-CNx膜成分、结构和性能的影响

Release Time:2024-10-17  Hits:

Indexed by: Conference Paper

Date of Publication: 2022-07-02

Journal: 第十四届全国等离子体科学技术会议暨第五届中国电推进技术学术研讨会

Page Number: 1

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