location： Current position: Home >> Scientific Research >> Paper Publications

沉积偏压及N2流量对a-CNx膜成分、结构和性能的影响

Hits:

Indexed by:会议论文

Date of Publication:2022-07-02

Journal:第十四届全国等离子体科学技术会议暨第五届中国电推进技术学术研讨会

Page Number:1

Pre One:微波ECR等离子体特性及其对DLC膜性能的影响

Next One:沉积参数对碳氮化硅薄膜化学结构及光学性能的影响
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep