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Indexed by:期刊论文

Date of Publication:2022-06-30

Journal:真空科学与技术学报

Issue:2

Page Number:146-149

ISSN No.:1672-7126

Abstract:Various properties of microwave electron cyclotron resonance (ECR) plasma, including gas flow rate, plasma density and dependence of electron temperature on gas pressure, were measured with Langmuir probe to improve diamond-like carbon (DLC) film growth. We found that film growth conditions considerably affect microstructure and quality of DLC film. For example higher plasma density favors DLC film growth.

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