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等离子体诊断用多功能探针

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First Author:Wenqi Lu

Disigner of the Invention:wangyounian,dengxinlv,XU Jun,dongchuang,邱大伟,范鹏辉

Application Number:CN200910306774.6

Authorization Date:2009-09-09

Authorization number:CN101650230

Pre One:一种射频放电等离子体诊断装置
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