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一种射频放电等离子体诊断装置

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First Author:Wenqi Lu

Disigner of the Invention:wangyounian,dengxinlv,XU Jun,dongchuang

Application Number:CN201110003263.4

Authorization Date:2011-01-08

Authorization number:CN102209425A

Pre One:射频等离子体探针装置

Next One:等离子体诊断用多功能探针
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