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一种采用反应磁控溅射制备二氧化铪基铁电薄膜的方法

Release Time:2022-10-20  Hits:

First Author: Dayu ZHOU

Disigner of the Invention: 孙纳纳,徐进,XU Jun,Zhang Yu,赵鹏

Institution: 材料科学与工程学院

Application Number: ZL 2018 1 0171185.0

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