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Date of Publication:2022-10-06
Journal:APPLIED PHYSICS A MATERIALS SCIENCE PROCESSING
Affiliation of Author(s):物理学院
Volume:102
Issue:2
Page Number:353-358
ISSN No.:0947-8396
Pre One:基于双热电偶校准ECR-PEMOCVD薄膜生长温度分析研究
Next One:用N_2-H_2等离子体氮化GaAs衬底对ECR-PEMOCVD生长立方GaN的影响(英文)