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基于双热电偶校准ECR-PEMOCVD薄膜生长温度分析研究

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Date of Publication:2022-10-10

Journal:红外技术

Volume:29

Issue:2

Page Number:79-82

ISSN No.:1001-8891

Note:新增回溯数据

Pre One:基于RHEED图像外延GaN基薄膜表面晶格演变分析

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