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一种β-碳化硅薄膜的制备方法

Release Time:2016-09-21  Hits:

Disigner of the Invention: 边继明,张志坤,Qin Fuwen,刘维峰,骆英民

Application Date: 2013-07-13

Application Number: ZL2013 1 0293452.9

Authorization Date: 2016-01-20

Service Invention or Not: No

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