Experimental study on ultrasonic stress relief for cured SU-8 photoresist layer
Release Time:2016-12-06 Hits:
Indexed by: Journal Papers
Date of Publication: 2010-12-01
Journal: Microelectronic Engineering
Included Journals: EI、SCI
Volume: 87
Issue: 12
Page Number: 2555–2560
Note: JCR二区，IF：1.227（2015）