Reduction of internal stress in SU-8 photoresist layer by ultrasonic treatment
Release Time:2016-12-06 Hits:
Indexed by: Journal Papers
Date of Publication: 2010-11-09
Journal: SCIENCE CHINA - TECHNOLOGICAL SCIENCES
Included Journals: EI、SCI
Volume: 55
Issue: 11
Page Number: 3006-3013
Note: JCR二区，IF：1.441（2015）