界 面 钻 蚀 主 导 的 准 各 向 异 性 湿 法 刻 蚀 法 制 备玻 璃 微 棱 镜 阵 列
Release Time:2024-08-25 Hits:
Date of Publication: 2024-05-31
Journal: Optics and Precision Engineering
Volume: 32
Issue: 9
Page Number: 1384-1394
ISSN: 1004-924X
Key Words: Anisotropic wet etching; Anisotropy; Borosilicate glass; Corrosion resistance; Etching process; Interfacial erosion; Isotropics; Micro-prism arrays; Microprisms; Prisms; Quasi-anisotropic etching; Superior corrosion; Thermal durability; Wet etching; Wet etching techniques