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Date of Publication:2024-05-31

Journal:Optics and Precision Engineering

Volume:32

Issue:9

Page Number:1384-1394

ISSN No.:1004-924X

Key Words:Anisotropic wet etching; Anisotropy; Borosilicate glass; Corrosion resistance; Etching process; Interfacial erosion; Isotropics; Micro-prism arrays; Microprisms; Prisms; Quasi-anisotropic etching; Superior corrosion; Thermal durability; Wet etching; Wet etching techniques