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集成厚度可控绝缘层的非接触电导检测微芯片制作方法

Release Time:2019-03-09  Hits:

First Author: 刘军山

Disigner of the Invention: 王立鼎,杜立群,徐征,Chong Liu,徐飞

Application Number: CN201210132614.6

Authorization Date: 2012-05-02

Authorization Number: CN102641759A

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