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一种提高微电铸器件尺寸精度的超声处理方法

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Disigner of the Invention:liujunshan,徐征,Chong Liu,王启佳,张本状,duliqun

Affilication of Author(s):机械工程学院

Application Date:2010-03-25

Application Number:201010133989.5

Authorization Date:2012-02-29

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