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一种电热驱动微结构的制作方法

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Disigner of the Invention:徐征,liujunshan,Chong Liu,李永辉,贾胜芳,duliqun

Affilication of Author(s):机械工程学院

Application Date:2010-04-16

Application Number:201010149262.6

Authorization Date:2012-08-01

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