Personal Information

Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates

Paper Publications

[41]Yin, Zhifu, Qi, Liping, Zou, Helin, Sun, Lei, HL (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China..A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diamet...[J],SCIENTIFIC REPORTS,2016,6:18921
[42]邹赫麟.A new dry etching method with the high etching rate for patterning crosslinked SU-8 thick films[J],Journal of Electrical Engineering,2016,3(2):1-6
[43]齐莉萍, 邹赫麟.A novel 2D silicon nano-mold fabricationtechnique by inclined-deposition and Ar etching over 4 in...[J],Scientific Reports,2016,6(1):1892101-1892110
[44]Yin, Zhifu, Sun, Lei, Cheng, E., Zou, Helin, HL (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China..Numerical study on the de-molding behavior of 2D PMMA nanochannles during hot embossing process[J],2nd International Conference on Smart Systems Engineering (SmaSys 2014),2016,22(1,SI):129-135
[45]韩敬宁, 殷志富, 李超, 王文强, 邹赫麟.Fabrication of chamber for piezo inkjet printhead by SU-8 photolithography technology and bonding...[J],Microsystem Technologies,2016,22(4):721-726
[46]Lu, Bolin, Yin, Zhifu, Zou, Helin, Zhi, Lisha, Feng, Jianbo, HL (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian, Peoples R China..Characterization of Parylene C as protective layer on micro-piezoelectric printheads[J],MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2015,40:811-816
[47]颜改革, 韩敬宁, 殷志富, 邹赫麟.硅基深宽比结构与SiO2薄膜的干法刻蚀方法研究[J],仪表技术与传感器,2015,11:1-3,14
[48]Ma, Guangyi, Zou, Helin, Wu, Dongjiang, Niu, Fangyong, GY (reprint author), Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Liaoning, Peoples R China..Microstructure evolution and mechanical property of pulsed laser welded Ni-based superalloy[J],OPTICS AND LASERS IN ENGINEERING,2015,72:39-46
[49]鲁伯林, 智利莎, 柳永丽, 邹赫麟.Parylene C在压电喷头中的应用研究[J],机电技术,2015,4:117-120,126
[50]Yin, Zhifu, Qi, Liping, Zou, Helin, Sun, Lei, Xu, Shenbo, ZF (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China..A novel bonding method for fabrication of PET planar nanofluidic chip with low dimension loss a...[J],JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2015,25(8)

total93 5/10

first previous next last Page

Home

Scientific Research

Teaching Research

Awards and Honours

Enrollment Information

Student Information

My Album

Blog

Personal Information

Paper Publications