Improvement of crystal quality and UV transparence of dielectric Ga2O3 thin films via thermal annealing in N-2 atmosphere
Release Time:2024-12-06 Hits:
Date of Publication: 2022-10-03
Journal: JOURNAL OF MATERIALS SCIENCE MATERIALS IN ELECTRONICS
Volume: 23
Issue: 2
Page Number: 542-545
ISSN: 0957-4522