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Characteristics of plasma immersion ion implantation with a nanosecond rise-time pulse: particle-in-cell simulations

Release Time:2022-10-07  Hits:

Date of Publication: 2022-10-05

Journal: JOURNAL OF PHYSICS D APPLIED PHYSICS

Institution: 物理学院

Volume: 43

Issue: 27

ISSN: 0022-3727

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