A27Ece5UcRiDzpyygBwcIalWrp1Z6wennVS3TLZwL2E3ZN9NOtTupyV0G1dk
Current position: Home >> Scientific Research >> Paper Publications

Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas

Release Time:2025-02-23  Hits:

Date of Publication: 2022-10-08

Journal: JOURNAL OF PHYSICS D APPLIED PHYSICS

Institution: 物理学院

Volume: 45

Issue: 30

ISSN: 0022-3727

Prev One:Quasi-delta negative ions density of Ar/O-2 inductively coupled plasma at very low electronegativity

Next One:Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition
Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Mobile phone sweep