Quasi-delta negative ions density of Ar/O-2 inductively coupled plasma at very low electronegativity
Release Time:2025-02-23 Hits:
Date of Publication: 2022-10-08
Journal: CHINESE PHYSICS B
Institution: 物理学院
Volume: 30
Issue: 5
ISSN: 1674-1056
Key Words: "inductively coupled plasma; Ar; O-2 discharge; very low electronegativity; delta distribution of anions"