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Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency sources

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Date of Publication:2022-10-07

Journal:JOURNAL OF APPLIED PHYSICS

Affiliation of Author(s):物理学院

Volume:108

Issue:4

ISSN No.:0021-8979

Pre One:Non-monotonic behavior of electron temperature in argon inductively coupled plasma and its analysis via novel electron mean energy equation

Next One:Quasi-delta negative ions density of Ar/O-2 inductively coupled plasma at very low electronegativity
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