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Comparison between experiment and simulation for argon inductively coupled plasma

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Date of Publication:2022-10-05

Journal:PHYSICS OF PLASMAS

Affiliation of Author(s):物理学院

Volume:16

Issue:11

Page Number:113502

ISSN No.:1070-664X

Pre One:Characterization of O-2/Ar inductively coupled plasma studied by using a Langmuir probe and global model

Next One:Comparison of electrostatic and electromagnetic simulations for very high frequency plasmas
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