location： Current position: Home >> Scientific Research >> Paper Publications

Characterization of O-2/Ar inductively coupled plasma studied by using a Langmuir probe and global model

Hits:

Date of Publication:2022-10-05

Journal:PLASMA SOURCES SCIENCE TECHNOLOGY

Affiliation of Author(s):物理学院

Volume:24

Issue:2

ISSN No.:0963-0252

Pre One:Changes of the electron dynamics in hydrogen inductively coupled plasma

Next One:Comparison between experiment and simulation for argon inductively coupled plasma
Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep