location: Current position: Home >> Scientific Research >> Paper Publications

Changes of the electron dynamics in hydrogen inductively coupled plasma

Hits:

Date of Publication:2022-10-05

Journal:Chinese Physics B

Affiliation of Author(s):物理学院

Volume:22

Issue:11

ISSN No.:1674-1056

Pre One:Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study

Next One:Characterization of O-2/Ar inductively coupled plasma studied by using a Langmuir probe and global model