Release Time:2025-02-23 Hits:
Date of Publication: 2022-10-05
Journal: Physics of Plasmas
Volume: 28
Issue: 10
ISSN: 1070-664X
Prev One:The effect of F-2 attachment by low-energy electrons on the electron behaviour in an Ar/CF4 inductively coupled plasma
Next One:Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study