j77R3I39Uu0ZFh56GgDInLntfmQ974Ik8tal1YKYKXQ5Q5cmjg5qCF7AGWbw
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Hysteresis induced by gap length effects in capacitively coupled plasmas at low pressures

Release Time:2025-02-23  Hits:

Date of Publication: 2022-10-03

Journal: JOURNAL OF PHYSICS D APPLIED PHYSICS

Volume: 42

Issue: 10

ISSN: 0022-3727

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