Release Time:2025-02-23 Hits:
Date of Publication: 2022-10-02
Journal: Chinese Physics B
Institution: 物理学院
Volume: 27
Issue: 12
ISSN: 1674-1056
Prev One:Geometry Effects of SDBD Actuator on Atmospheric-Pressure Discharge Plasma Airflow Acceleration
Next One:Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma