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Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows

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Date of Publication:2022-10-02

Journal:Chinese Physics B

Affiliation of Author(s):物理学院

Volume:27

Issue:12

ISSN No.:1674-1056

Pre One:Geometry Effects of SDBD Actuator on Atmospheric-Pressure Discharge Plasma Airflow Acceleration

Next One:Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plasma
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