Release Time:2025-02-23 Hits:
Date of Publication: 2022-10-02
Journal: JOURNAL OF APPLIED PHYSICS
Institution: 物理学院
Volume: 105
Issue: 8
ISSN: 0021-8979
Prev One:F-atom kinetics in SF6/Ar inductively coupled plasmas
Next One:Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma