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F-atom kinetics in SF6/Ar inductively coupled plasmas

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Date of Publication:2022-10-02

Journal:JOURNAL OF VACUUM SCIENCE TECHNOLOGY A

Volume:34

Issue:3

ISSN No.:0734-2101

Pre One:Experimental and Numerical Studies of Pulse-Modulated ICP Discharges

Next One:Fluid simulation of the E-H mode transition in inductively coupled plasma
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