Release Time:2026-01-05 Hits:
Title of Achievement: 大尺寸晶圆的高效低损伤减薄磨削理论与关键技术
Granted by: 大连理工大学
Level of Award: Provincial and ministerial level
Grade of Award: 一等奖
Date of Award: 2019-01-15
Number of Participants: 3
Prev One:中国机械工业科学技术奖