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Scientific Research
Shang GAO
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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Scientific Research
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宋鑫, 胡博宇, Guo, Jiani, Renke Kang, Shang GAO.Double-Oxidant-Induced Slurry Reaction Mechanism and Performance on Chemical Mechanical Polishing of 4H-SiC (0001) Wafer.[J],Langmuir : the ACS journal of surfaces and colloids,2024
顾志斌, 王浩祥, 宋鑫, Renke Kang, Shang GAO.单晶碳化硅电化学机械抛光液的组分设计与优化[J],金刚石与磨料磨具工程,2024,44(05):675-684
杨鑫, Dong Zhigang, Renke Kang, Shang GAO.Cleavage and anisotropy dependence of material removal behavior of monocrystalline β-Ga2O3 in abrasive machining[J],Wear,2024
王崇昆, 耿大彦, 王凯旋, Maggie Guo, Shang GAO.Effects of Ar ion bombardment on the structure and properties of β-quartz[J],CERAMICS INTERNATIONAL,2024,50(21):43264-43278
Xue, Saisai, 贾玙璠, Maggie Guo, Shang GAO, Renke Kang.基 于 磨 粒 三 维 轨 迹 的 钽 酸 锂 双 面 研 磨 均 匀 性[J],Optics and Precision Engineering,2024,32(13):2081-2090
Zhang, Shuohua, Maggie Guo, jinzhuji, Renke Kang, Tang, William C, Shang GAO.Subnanoscale Ion Beam Modification-Assisted Smoothing of Heterostructure Surfaces[J],ACS APPLIED MATERIALS & INTERFACES,2024,16(29):38744-38756
Patents
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一种用于蜂窝芯材料切削的超声振动系统
一种薄壁筒类工件内圆磨削径向定位单元及定位装卡装置
一种非接触式旋转超声加工能量传输及反馈信号采集的装置和方法
一种控制磨削参数的磨削方法
一种机械密封环摩擦力测量装置及测量方法
超精密低损伤磨削硅片的软磨料砂轮
Published Books
硅片超精密磨削理论与技术
High-Speed Grinding of Advanced Ceramics and Combination Materials.
Research Projects
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大尺寸硅片高效精密磨削加工用砂轮开发及应用, 省、市、自治区科技项目, 2024/08/06, 在研
半导体装备和主轴性能测试分析, 事业单位委托科技项目, 2024/11/08, 在研
全国科普教育基地培育计划, 省、市、自治区科技项目, 2024/08/01, 在研
主反左展开瓣蜂窝工序等外协, 企事业单位委托科技项目, 2024/06/04, 在研
第二副反射面蜂窝工序等外协, 企事业单位委托科技项目, 2024/06/04, 在研
超声辅助加工系统, 其他课题, 2024/05/27, 在研