Insights into the role of electrolytes in slurry performance for photoelectrochemical mechanical polishing of GaN wafers
Release Time:2026-03-29 Hits:
Indexed by: Journal Papers
Document Code: 474843
Date of Publication: 2025-01-01
Journal: JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T
Volume: 36
Page Number: 2096-2104
ISSN: 2238-7854
Key Words: GALLIUM NITRIDE