Electric-field-modulated oxidation and its effect on photoelectrochemical mechanical polishing of 4H-SiC
Release Time:2026-03-29 Hits:
Indexed by: Journal Papers
Document Code: 475685
Date of Publication: 2025-06-01
Journal: INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES
Volume: 295
ISSN: 0020-7403
Key Words: BAND-GAP; LAYER; MODEL; SEMICONDUCTORS; SURFACES; THERMAL-OXIDATION; WATER