Current position: Home >> Scientific Research >> Patents

一种多工位宽禁带半导体晶片光电化学机械抛光装置及方法

Release Time:2026-03-13  Hits:

First Author: Dong Zhigang

Disigner of the Invention: Renke Kang,赵杨,孙跃文,Shang GAO

Institution: 机械工程学院

Prev One:大长径比弱刚性磨杆磨削圆环端面的加工方法

Next One:一种同轴度调整装置及方法
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click:Times MOBILE Version
The Founding Time : ..
The Last Update Time : ..

Browse on mobile