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半导体装备和主轴性能测试分析

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Leading Scientist:蔡引娣

Project Participants:Bao Yan,Dong Zhigang,Shang GAO,Maggie Guo,zhuxianglong,Renke Kang

Supported by:事业单位委托科技项目

Status:在研

Supported by:沈阳和研科技股份有限公司

Nature of Project:横向

Date of Project Approval:2024-11-08

Scheduled completion time:2026-11-01

Date of Project Initiation:2024-11-01

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