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硅片超精密磨削理论与技术

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Faculty/School:机械工程学院

The First Author:Dongming Guo

Co-author:Renke Kang,Maggie Guo,Dong Zhigang,zhuxianglong,Shang GAO

Publisher:电子工业出版社

Translated or Not:no

Next One:High-Speed Grinding of Advanced Ceramics and Combination Materials.