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晶圆减薄装备整机精度生成与损伤理论

Release Time:2019-12-26  Hits:

Leading Scientist: Renke Kang

Project Participants: Shang GAO

Project Source: 国家自然科学基金项目

Sub-Class of Project: 重大项目课题

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 51991372

Date of Project Approval: 2019-12-02

Scheduled Completion Time: 2024-12-31

Date of Project Initiation: 2020-01-01

Date of Project Completion: 2025-11-05

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