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晶圆减薄装备整机精度生成与损伤理论

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Leading Scientist:Renke Kang

Project Participants:Shang GAO

Supported by:国家自然科学基金项目

Sub-Class of Project:重大项目课题

Status:在研

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:51991372

Date of Project Approval:2019-12-02

Scheduled completion time:2024-12-31

Date of Project Initiation:2020-01-01

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