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基于国产晶圆键合设备的金刚石与GaN 微波功率器件研究

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Leading Scientist:高尚

Supported by:国家科技部

Status:在研

Supported by:中国电子科技集团公司第十三研究所

Nature of Project:纵向

Project Approval Number:2022YFB3404304

Date of Project Approval:2022-12-13

Scheduled completion time:2025-11-30

Date of Project Initiation:2022-12-01

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