Current position: Home >> Scientific Research >> Paper Publications

Surface layer damage of quartz glass induced by ultra-precision grinding with different grit size

Release Time:2019-03-12  Hits:

Indexed by: Conference Paper

Date of Publication: 2017-01-01

Volume: 872

Page Number: 19-24

Prev One:Surface integrity and removal mechanism in grinding sapphire wafers with novel vitrified bond diamond plates

Next One:工件旋转法磨削硅片的磨粒切削深度模型