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硅片超精密磨削减薄工艺基础研究

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Date of Publication:2015-01-01

Journal:机械工程学报

Affiliation of Author(s):机械工程学院

Issue:7

Page Number:52-52

ISSN No.:0577-6686

Note:新增回溯数据

Pre One:硅片低损伤磨削砂轮及其磨削性能

Next One:石英玻璃超精密磨削加工的表面完整性研究
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