Current position: Home >> Scientific Research >> Paper Publications

The deformation pattern of single crystal β-Ga2O3 under nanoindentation

Release Time:2022-10-04  Hits:

Date of Publication: 2022-10-03

Journal: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Volume: 71

Issue: -

Page Number: 321-325

Prev One:Grinding performance of diamond grinding tools for sapphire crystal

Next One:A comparative study of lapping and grinding induced surface/subsurface damage of silicon wafers and corresponding polishing efficiency