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氧化镓单晶的磨削材料去除机理和损伤演化研究

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Date of Publication:2024-05-21

Journal:湖南大学学报(自然科学版)

Volume:51

Issue:04

Page Number:10-19

ISSN No.:1674-2974

Key Words:亚表面损伤; 半导体材料; 氧化镓单晶; 磨削; 纳米划痕

CN No.:43-1061/N

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